3DCAP

The capacitance miniaturisation integrated over electronic dies yields to adopt 3D structures and to seek materials with high dielectric constant. The 3DCAP project develops a breakthrough process for surface coating of mixed-oxydes (perovskites, titanates,...) particularly well adapted for 3D-structure design. The project will eventually obtain capacitances up to 1000nF/mm2, which is 10 to 20 times more than integrated capacitors available from the latest R&D developments.